MNC2025 held in Tokyo on 18-19 Nov. 2025

We attended the international conference MNC2025 held in Ryogoku, Tokyo, and presented a poster.

Masako Okumura(M1), “Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information”

Institute of Science Tokyo Institute of Integrated Research Sone・Chang Group
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