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2012年

公表論文	1	Fumihiro Wakai,Hirotaka Fukutome,Norihiro Kobayashi,Tomoyuki Misaki,Yutaka Shinoda,Takashi Akatsu,Masato Sone,Yakichi Higo. Direct observation of sintering mechanics of a single grain boundary, Acta Materialia, Vol. 60, pp. 507-516, Feb. 2012.
	2	Hiromichi Kurosu, Saki Nakanishi, Saori Kimura, Sungmin Kang, Xiaodong Li, Masato Sone, "Solid-state 13C NMR Study of Banana Liquid Crystals. 1. Two Different Alkyl Tail-Group Packing Environments in the B7 Phase", Journal of Molecular Structur, Elsevier, Vol. 1008, pp. 49-53, Nov. 2012.
	3	Hiroki Uchiyama, Tatsuro Endo, Masato Sone , "Direct Observation of Nodule Growth on Electroless Ni-P Deposition in Supercritical CO2 Emulsion" , Journal of the Electrochemical Society, Electrochemical Society, Vol. 59, No. 2, pp. D114-D118, Jan. 2012.
	4	Nao Shinoda, Tetsuya Shimizu, Tso-Fu Mark Chang, Akinobu Shibata, Masato Sone. "Filling of nanoscale holes with high aspect ratio by Cu electroplating using suspension of supercritical carbon dioxide in electrolyte with Cu particles", Microelectronic Engineering, Elsevier, Vol. 97C pp. 126-129, Aug. 2012.
	5	Chiemi Ishiyama, Toshikazu Tasaki, Tso-Fu Mark Chang,and Masato Sone, Effects of Specimen Dimensions on Adhesive Shear Strength between a Microsized SU-8 Column and Silicon Substrate, Japan Journal of Applied Physics, Vol.51, No.6, P.06FL19, June 2012.
	6	Hirohito Imamura, Takashi Nagoshi, Akari Yoshida, Tso-Fu Mark Chang, Susumu Onaka, Masato Sone. Evaluation of anisotropic structure in electrodeposited Ni film using micro-sized cantilever, Microelectronic Engineering., Elsevier, Vol. 100 No. C pp. 25-27, Oct. 2012.
	7	曽根正人, 清水哲也, Tso-Fu Mark Chang. 超臨界ナノプレーティング法の開発と超微細配線への応用, 精密工学会誌, 精密工学会, Vol. 78, No. 12, Dec. 2012.
国際会議	8	Tso-Fu Mark Chang,Chiemi Ishiyama,Masato Sone. Study of Supercritical CO2 Emulsion in Ni Electroplating and Application in Fabrication of Defect-Free Micromechanical Component with High Aspect Ratio,　 2012 TMS Annual Meeting & Exhibition, Materials Processing Fundamentals, p. 100, Feb. 2012.
	9	Tso-Fu Mark Chang,Chiemi Ishiyama,Masato Sone. Defect-free ultrathin nickel film fabricated by application of Sc-CO2 emulsion to control thickness of the diffusion layer, APCChE2012: 14th Asia Pacific Confederation of Chemical Engineering Congress, p.100, Feb. 2012.
	10	Masato Sone. "Metallization method on polymeric materials by electroplating method using supercritical CO2 toward application into bioelectronics" (Invited Lecture), Biosensors & Bioelectronics-2012, International Conference and Exhibition on Biosensors & Bioelectronics, OMICS Group, Vol. 2, no. 2, p. 61, May. 2012.
	11	Masahide Mutoh, Takashi Nagoshi, Tso-Fu Mark Chang, Masato Sone. Effect of current density on mechanical properties of electrodeposited Cu film evaluated by micro-pillar compression test method, ISE2012, 63rd annual meeting of the International Society of Electrochemistry, Aug. 2012.
	12	Tso-Fu Mark Chang, Chiemi Ishiyama, Donald W. Kirk, Masato Sone. Periodic-Plating-Characteristic of Electroplating with Supercritical Carbon CO2 Emulsion, ISE2012, 63rd annual meeting of the International Society of Electrochemistry, Aug. 2012.
	13	Tetsuya Shimizu, Yuma Ishimoto, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone. Continuous flow reaction system for nanoscale wiring by Cu electroplating using suspension of supercritical CO2 in electrolyte with Cu particles, 38th International Conference on Micro and Nano Engineering, (MNE2012), Sep. 2012.
	14	Masahide Mutoh, Takashi Nagoshi, Tso-Fu Mark Chang, Masato Sone. Micro compression test using non-tapered micro-pillars of electrodeposited Cu, 38th International Conference on Micro and Nano Engineering, (MNE2012), Sep. 2012.
	15	Hirohito Imamura, Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone. Multidirectional strength of micro-sized cantilever composed of columnar grains in electrodeposited Ni, 38th International Conference on Micro and Nano Engineering, (MNE2012), Sep. 2012.
	16	Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone. Evaluation of Mechanical properties of electroplated Nickel, 38th International Conference on Micro and Nano Engineering, (MNE2012), Sep. 2012.
	17	Tso-Fu Mark Chang, Chiemi Ishiyama, Tatsuo Sato, Masato Sone. Quantitative Study on Removal of SU-8 Photoresist Patterns by Supercritical CO2 Emulsion, 38th International Conference on Micro and Nano Engineering, (MNE2012), Sep. 2012.
	18	Junpei Matsuzaki, Chiemi Ishiyama, Masato Sone, Yakichi Higo. Effects of Chemical Components on the Bending Properties of Micro-sized Cantilevers in SU-8, 38th International Conference on Micro and Nano Engineering, (MNE2012), Sep. 2012.
	19	Masato Sone, Tetsuya Shimizu, Nao Shinoda, Tso-Fu Mark Chang. Application of Electrodeposition using Supercritical Carbon Dioxide Emulsion into Integrated Circuit Technology (Invited Lecture), TSCFA2012, Oct. 2012.
	20	Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone. Micro-compression test of nanocrystalline Nickel deposited by supercritical carbon dioxide emulsion, ICETI 2012, The 2nd International Conference on Engineering and Technological Innovation, Applied Mechanics and Materials, Nov. 2012.
	21	Tso-Fu Mark Chang, Takashi Nagoshi, Chiemi Ishiyama, Tatsuo Sato, Masato Sone. Intact Ultrathin Ni Films Fabricated by Electroplating with Supercritical CO2 Emulsion, ICETI 2012, The 2nd International Conference on Engineering and Technological Innovation, Applied Mechanics and Materials, Nov. 2012.
	22	Takashi Nagoshi, Yuuki Karasawa, Akinobu Shibata, Tatsuo Sato, Masato Sone. Deformation Behavior of Fully Nano-Twinned BCT Material in a Micro-Compression Test, MRS - Fall Meeting 2012, MRS Proceeding, Dec. 2012.
	23	Hirohito Imamura, Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone. Deformation behavior of electrodeposited Ni film by using micro-compression test, MRS - Fall Meeting 2012, MRS Proceeding, Dec. 2012.
	24	Masato Sone, (Invited Lecture), “Electrodeposition using Supercritical Carbon Dioxide Emulsion --Application into Integrated Circuit Technology & Micro Electro Mechanical Systems-”, National Taiwan University, oct.2012
	25	Masato Sone, (Invited Lecture),“Electrodeposition using Supercritical CO2 Emulsion for Application into Integrated Circuit Technology & MEMS”, National Cheng Kung University, nov.2012
	26	Masato Sone, (Invited Lecture),“Electrodeposition using Supercritical CO2 Emulsion toward Integrated Circuit Technology & Micro Electro Mechanical Systems”, Metal Industries Research and Development Centre(MIRDC) at Kaohsiung Taiwan, nov.2012
国内会議	27	曽根正人, 超臨界二酸化炭素を用いたマイクロマテリアル作成手法の開発, 第48回マイクロマテリアル部門委員会「マイクロマテリアルの製造プロセス」, Jan. 2012.
	28	曽根正人, 超臨界二酸化炭素を用いた電気めっき方法における反応制御と装置開発 (招待講演), 反応工学部会CVD反応分科会第15 回シンポジウム, 化学工学会, May. 2012.
	29	曽根正人. 超臨界二酸化炭素を利用したマイクロマテリアルの精密成形（招待講演）, センサ・マイクロマシンと応用システムシンポジウム「機能性材料と新機能デバイスの可能性」, Jul. 2012.
	30	曽根正人. 超臨界二酸化炭素を用いた電気めっき技術とその応用(招待講演), 表面技術協会めっき部会, Sep. 2012.
書籍・雑誌	31	曽根正人. 「半導体・MEMSのための超臨界流体技術 (近藤英一監修)」, コロナ社, Jun. 2012.
書籍・雑誌	32	曽根正人. 環境調和型ゼロエミッション次世代半導体配線形成方法の研究開発, 化学工学, 化学工学会, Vol. 76, No. 4, Apr. 2012

論文＆会議