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2017年

公表論文	1	Wan-Ting Chiu, Yuma Tahara, Chun-Yi Chen, Tso-Fu Mark Chang, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone, "Silk-Pt Composite Integration by Supercritical Carbon Dioxide Assisted Electroless Plating for Medical Devices Application", Microelectronics Engineering., Vol.175, pp.34-37, Jan-17
	2	Kimiko Yoshida, Norimasa Nishiyama, Masato Sone, Fumihiro Wakai, "Strength and toughness of nanocrystalline SiO2 stishovite toughened by fracture-induced amorphization", Acta Materialia., Vol.124, pp.316-324, Jan-17
	3	Akira Umise, Rui Serizawa, Sari Yanagida, Kenji Goto, Masaki Tahara, Tso Fu Mark Chang, Tomonari Inamura, Masato Sone, Hideki Hosoda, "Deformation of Biomedical AuCuAl-Based Shape Memory Alloy Micropillars", MRS Advances., pp.1-5, Mar-17
	4	Tso-Fu Mark Chang, Wei-Hao Lin, Chun-Yi Chen, Yung-Jung Hsu, Masato Sone, "The Hydrobaric Effect on Cathodically Deposited Titanium Dioxide Photocatalyst", MRS Communications., in press, Apr-17
	5	Hao-Chun Tang, Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices", Journal of The Electrochemical Society., No.164, Vol.4, pp.D244-D247, Apr-17
	6	Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Tensile Tests of Micro-Specimens Made of Electroplated Gold", Microelectronics Engineering., No.174, pp.6-10, Apr-17
	7	Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures", Materials Letters., No.202, pp.82-85, May-17
	8	Wan-Ting Chiu, Yuma Tahara, Chun-Yi Chen, Tso-Fu Mark Chang, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone, "A Supercritical CO2 Promoted Electroless Ni-P Plating on Silk and Their Fundamental Characteristics Investigations", Journal of The Electrochemical Society., No.164, Vol.7, pp.D406-D411, May-17
	9	Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices", Microelectronic Engineering., No.180, pp.15-19, Jun-17
	10	Wan-Ting Chiu, Yuma Tahara, Chun-Yi Chen, Tso-Fu Mark Chang, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone , "Fundamental Property Assessments of Biocompatible Silk?Pt Composite Prepared by Supercritical Carbon Dioxide Promoted Electroless Plating" , Industrial & Engineering Chemistry Research., No.56, Vol.31, pp.8864-8871, Jul-17
	11	Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone , "A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices" , Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems., pp.264-267, Aug-17
	12	Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu , " LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY" , Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)., pp.2187-2190, Aug-17
	13	Wan-ting Chiu, Chun-Yi Chen, Tso-Fu Mark Chang, Yuma Tahara, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone , " Fabrication and Photocatalytic Performance of Au/ZnO Layered Structure on Silk Textile for Flexible Device Applications " , Electrochimica Acta., No.253, pp.39-46, Sep-17
	14	Kengo Igawa, Tso-Fu Mark Chang, Chun-Yi Chen, Akira Umise, Takashi Nagoshi, Masaki Tahara, Tomonari Inamura, Hideki Hosoda, Volodymyr A. Chernenko, Masato Sone, "Micro-Compression Study of Ni-Fe(Co)-Ga Magnetic Shape Memory Alloy for MEMS Sensors", Proceedings of IEEE Sensors 2017.,pp.223-225, Oct-17
国際会議	1	Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone, "A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices", IEEE-NEMS 2017., Los Angeles, Apr-17
	2	Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, Kazuya Masu, "MEMS inertial sensors for biomedical applications", IEEE-NEMS 2017., Los Angeles, Apr-17
	3	Tso-Fu Mark Chang, Yi-Hsuan Chiu, Chun-Yi Chen, Yung-Jung Hsu, Masato Sone, "Effect of Applied Pressure on Photocatalytic Activity of Titanium Dioxide Synthesized by Cathodic Deposition with Supercritical Carbon Dioxide", 21st Topical Meeting of the International Society of Electrochemistry, Szeged, Apr-17
	4	Chun-Yi Chen, Hao-Chun Tang, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer", 21st Topical Meeting of the International Society of Electrochemistry, Szeged, Apr-17
	5	Chun-Yi Chen, Hao-chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components", SSI-21., Jun-17
	6	Hao-chun Tang, Chun-yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Micro-Mechanical Property Evaluation of Electroplated Au?Cu Alloys toward Applications in MEMS Accelerometers", SSI-21., Jun-17
	7	Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices" ,SSI-21., Jun-17
	8	Chun-Yi Chen, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications", RACI National Centenary Conference, Jul-17
	9	Yi-Hsuan Chiu, Chun-Yi Chen, Mitsuo Niinomi, Tso-Fu Mark Chang, Yung-Jung Hsu, Nobuhiro Matsushita, Masato Sone, "Ti-Nb-Ta-Zr-O Nanotubes Arrays and Their Applications for PEC Water Splitting", RACI National Centenary Conference, Jul-17
	10	Yi-Hsuan Chiu, Chun-Yi Chen, Mitsuo Niinomi, Tso-Fu Mark Chang, Yung-Jung Hsu, Nobuhiro Matsushita, Masato Sone, "One-Step Anodization Synthesis of Ti-Nb-Ta-Zr-O Nanotubes Arrays for Photoelectrochemical Water Oxidation", MNE2017., Braga, Sep-17
	11	Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test", MNE2017., Braga, Sep-17
	12	Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End", MNE2017., Braga, Sep-17
	13	Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices", MNE2017., Braga, Sep-17
	14	Wan-Ting Chiu, Yuma Tahara, Chun-yi Chen, Tso-fu Mark Chang, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone, "ZnO/Au Hybrid Layered Structure on Silk Textile Prepared by Supercritical Carbon Dioxide Promoted Electrodeposition for Application in Flexible Multifunction Electronic Devices", MNE2017., Braga, Sep-17
	15	Keisuke Asano, Hao-Chun Tang, Chun-yi Chen, Takashi Nagoshi, Tso-fu Mark Chang, Daisuke Yamane, Kazuya Masu, Masato Sone, "Enahnced Bending Strength of Electrodeposited Pure Gold Canrilevers in Micro-Bending Test", MNE2017., Braga, Sep-17
	16	Ken Hashigata , Hao-Chun Tang , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Toshifumi Konishi , Katsuyuki Machida , Kazuya Masu , Masato Sone, "Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components", TACT2017 International Thin Films Conference, Hualien, Oct-17
	17	Wan-Ting Chiu , Yuma Tahara , Chun-Yi Chen , Tso-Fu Mark Chang , Tomoko Hashimoto , Hiromichi Kurosu , Masato Sone, "Property Enhancement of Platinum Metallization on Silk by Supercritical Carbon Dioxide Promoted Electroless Plating", TACT2017 International Thin Films Conference, Hualien, Oct-17
	18	Wan-Ting Chiu , Haochun Tang , Chun-Yi Chen , Tso-Fu Mark Chang , Hiromichi Kurosu , Masato Sone, "Realization of flexible and photocatalytic ZnO/Au/silk composite materials as components in wearable devices", TSCFA 2017 Annual Meeting, Taichung, Oct-17
	19	Haochun Tang , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Katsuyuki Machida , Kazuya Masu , Masato Sone, "Utilization of supercritical carbon dioxide in the electrodeposition of Au films for MEMS application", TSCFA 2017 Annual Meeting, Taichung, Oct-17
	20	Kengo Igawa , Tso-Fu Mark Chang , Chun-Yi Chen , Akira Umise , Takashi Nagoshi , Masaki Tahara , Tomonari Inamura , Hideki Hosoda , Volodymyr A. Chernenko , Masato Sone, "Mechanical Property Evaluation of NiFeCGa Magnetic Shape Memory Alloys by Micro-Compression Tests for MEMS Sensors", IEEE Sensors 2017 Conference, Glasgow, Oct-17
	21	Koichiro Tachibana , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Toshifumi Konishi , Katsuyuki Machida , Kazuya Masu , Masato Sone, "Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology", 2017 MRS Fall Meeting, Boston, Nov-17
	22	Hao-chun Tang , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Katsuyuki Machida , Kazuya Masu , Masato Sone, "Ultrahigh Strength in Electroplated Nanocrystalline Au–Cu Alloys Evaluated by Micro-Compression Tests", 2017 MRS Fall Meeting, Boston, Nov-17
	23	Takuma Suzuki , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Toshifumi Konishi , Katsuyuki Machida , Kazuya Masu , Masato Sone, "Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology", 2017 MRS Fall Meeting, Boston, Nov-17
	24	Tso-Fu Mark Chang , Haochun Tang , Chun-Yi Chen , Takashi Nagoshi , Daisuke Yamane , Toshifumi Konishi , Katsuyuki Machida , Kazuya Masu , Masato Sone, "Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2", IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei, Nov-17
	25	Haochun Tang , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Toshifumi Konishi , Katsuyuki Machida , Kazuya Masu , Masato Sone, "Strategies of Mechanical Strengthening in Electroplated Au Materials", IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei, Nov-17
	26	Masato Sone , Haochun Tang , Chun-Yi Chen , Tso-Fu Mark Chang , Takashi Nagoshi , Daisuke Yamane , Toshifumi Konishi , Katsuyuki Machida , Kazuya Masu, "Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers", IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei, Nov-17
	27	Chun-Yi Chen , Yi-Hsuan Chiu , Tso-Fu Mark Chang , Yung-Jung Hsu , Mitsuo Niinomi , NOBUHIRO MATSUSHITA , Masato Sone, "Anodic Ti-Nb-Ta-Zr-O Nanotubes Array and Its Application for Photoelectrochemical Water Splitting", IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei, Nov-17
	28	Kengo Igawa , Tso-Fu Mark Chang , Chun-Yi Chen , Akira Umise , Takashi Nagoshi , Masaki Tahara , Tomonari Inamura , Hideki HOSODA , Volodymyr A. Chernenko , Masato Sone, "Mechanical Property Evaluation in Superelastic Ni-Fe(Co)-Ga Micro-Pillar", IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei, Nov-17
	29	Takuma Suzuki , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Toshifumi Konishi , Katsuyuki Machida , Kazuya Masu , Masato Sone, "Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever", IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei, Nov-17
	30	Koichiro Tachibana , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Toshifumi Konishi , Katsuyuki Machida , Kazuya Masu , Masato Sone, "Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components", IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei, Nov-17
	31	Keisuke Asano , Haochun Tang , Chun-Yi Chen , Takashi Nagoshi , Tso-Fu Mark Chang , Daisuke Yamane , Toshifumi Konishi , Katsuyuki Machida , Kazuya Masu , Masato Sone, "Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions", IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei, Nov-17
	32	Hideaki Nakajima , Tso-Fu Mark Chang , Chun-Yi Chen , Daisuke Yamane , Toshifumi Konishi , Hiroshi Toshiyoshi , Katsuyuki Machida , Kazuya Masu , Masato Sone, "Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition", IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei, Nov-17
国内会議	1	中島英亮, Chang Tso-Fu Mark, 陳君怡, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人, "積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）", 応用物理学会 2017年春季講演会., 14p-P3-12, パシフィコ横浜, Mar-17
	2	橘航一朗, Chang Tso-Fu Mark, Chen Chun-Yi, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人, "積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討", 応用物理学会 2017年春季講演会., 14p-P3-12, パシフィコ横浜, Mar-17
	3	鈴木拓真, Chang Tso-Fu Mark, Chen Chun-Yi, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人, "積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討", 応用物理学会 2017年春季講演会., 14p-P3-11, パシフィコ横浜, Mar-17
	4	佐布晃昭, 小西敏文, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之, "積層メタル技術による3軸MEMS加速度センサのばね定数設計方法", 応用物理学会 2017年春季講演会., 14p-P3-17, パシフィコ横浜, Mar-17 佐布晃昭, 小西敏文, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之, "積層メタル技術による3軸MEMS加速度センサのばね定数設計方法", 応用物理学会 2017年春季講演会., 14p-P3-17, パシフィコ横浜, Mar-17
	5	山根大輔, 小西敏文, 佐布晃昭, 中島英亮, 寺西美波, 陳君怡, Chang Tso-Fu Mark, 曽根正人, 年吉洋, 益一哉, 町田克之, "積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）", 応用物理学会 2017年春季講演会., 14p-P3-14, パシフィコ横浜, Mar-17
	6	小西敏文, 山根大輔, 佐布晃昭, 曽根正人, 年吉洋, 益一哉, 町田克之, "積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討", 応用物理学会 2017年春季講演会., 14p-P3-16, パシフィコ横浜, Mar-17
	7	井川健吾, 柳田佐理, Chang Tso-Fu Mark, Chen Chun-Yi, 田原正樹, 稲邑朋也, 細田秀樹, Chernenko Volodymyr A., 曽根正人, "微小圧縮試験片を用いたNiFeCoGa形状記憶合金の機械的特性評価", 応用物理学会 2017年春季講演会., パシフィコ横浜, Mar-17
	8	曽根正人, Chang Tso-Fu Mark, 陳君怡, 清水哲也, "超臨界二酸化炭素エマルションを用いた半導体銅配線プロセスの研究 (招待講演)", 電気化学会第84回大会., 東京, Mar-17
	9	海瀬晃, 芹澤留依, 柳田佐理, 後藤研滋, 田原正樹, Tso Fu Mark Chang, 稲邑朋也, 曽根正人, 細田秀樹, "AuCuAl 形状記憶合金単結晶マイクロピラーの圧縮変形挙動", 第160回金属学会春期大会講演., Mar-17
	10	曽根正人(招待講演), "非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価", 第63回国立大学共同利用・共同研究拠点知の拠点セミナー, Jun-17
書籍	1	Wan-ting Chiu, Mitsuo Sano, Cheng-Chuan Wang, Tso-Fu Mark Chang, Chun-Yi Chen, Hiromichi Kurosu, Masato Sone, "以超臨界二氧化碳無電鍍達成應用於穿戴式裝置之複合材料" ,ITRI Materialsnet., Oct-17
書籍	2	Tso-Fu Mark Chang, Chun-Yi Chen, Hao-Chun Tang, Masaharu Yoshiba, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors" ,Advances in Microelectronics Reviews., No.1, pp.93-106, Dec-17

論文＆会議