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2013年

公表論文	1	Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone, "Micro-compression test of nanocrystalline Nickel deposited by supercritical carbon dioxide emulsion", Applied Mechanics and Materials., Vol.284-287, pp.163-167, Jan. 2013
	2	Tso-Fu Mark Chang, Takashi Nagoshi, Chiemi Ishiyama, Tatsuo Sato, Masato Sone, "Intact Ultrathin Ni Films Fabricated by Electroplating with Supercritical CO2 Emulsion", Applied Mechanics and Materials.,Vol.284-287, pp.147-151, Jan. 2013
	3	Eri Shinada, Takashi Nagoshi, Tso-Fu Mark Chang, Masato Sone, "Crystallographic Study on Self-Annealing of Electroplated Copper at Room Temperature", Materials Science in Semiconductor Processing., in press, Jan. 2013
	4	Tso-Fu Mark Chang, Tetsuya Shimizu, Chiemi Ishiyama, Masato Sone, "Effects of Pressure on Electroplating of Copper using Supercritical Carbon Dioxide Emulsified Electrolyte", Thin Solid Films., vol.529, pp.25-28, Jan. 2013
	5	Nao Shinoda, Tetsuya Shimizu, Tso-Fu Mark Chang, Akinobu Shibata, Masato Sone, "Cu electroplating using suspension of supercritical carbon dioxide in copper-sulfate-based electrolyte with Cu particles", Thin Solid Films., vol.529, pp.29-33, Jan. 2013
	6	Taiki Uemura, Tso-Fu Mark Chang, Akinobu Shibata, Masato Sone, "Abnormally large Ni grains epitaxially grown by electrodeposition on Cu substrate", Thin Solid Films., vol.529, pp.385-388, Jan. 2013
	7	Tetsuya Shimizu, Nao Shinoda, Tso-Fu Mark Chang, Akinobu Shibata, Masato Sone, "Crystal growth on novel Cu electroplating using suspension of supercritical CO2 in electrolyte with Cu particles", Surface & Coating Technology.,vol.231, pp.77-80, Aug. 2013
	8	Hiromichi Kurosu, Yumi Endo, Saori Kimura, Tomoko Hashimoto, Motoi Harada, Eun-Woo Lee, Masato Sone, Junji Watanabe, Sungmin Kang. Solid-state 13C NMR study of banana liquid crystals – 2 : Alkyl tail-group packing environments in the hexagonal columnar phase, Journal of Molecular Structure,No.1040, pp.117-121, Mar. 2013
	9	Akinobu Shibata, Takashi Nagoshi, Masato Sone, Yakichi Higo, "Micromechanical characterization of deformation behavior in ferrous lath martensite", Journal of Alloys and Compounds., vol.577. No.S1, pp.555-558, Apr. 2013
	10	Masahide Mutoh, Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone, "Micro-compression test using non-tapered micro-pillar of electrodeposited Cu" ,Microelectronic Engineering.,vol.111, pp.118-121, , Elsevier, Jun.2013
	11	Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone, "Mechanical Properties of Nickel Fabricated by Electroplating with Supercritical CO2 Emulsion Evaluated by Micro-Compression Test Using Non-Tapered Micro-sized Pillar",Microelectronic Engineering., No.110, pp.269-272, Elsevier ,Sep.2013
	12	Junpei Matsuzaki, Chiemi Ishiyama, Masato Sone, Yakichi Higo," Effects of Chemical Components on the Bending Properties of Micro-sized Cantilevers in three types of SU-8", Microelectronic Engineering.,No.110, pp.108-111, Elsevier, Sep.2013
	13	Tso-Fu Mark Chang, Chiemi Ishiyama, Tatsuo Sato, Masato Sone. Quantitative Study on Removal of SU-8 Photoresist Patterns by Supercritical CO2 Emulsion, Microelectronic Engineering., No.110, pp.204-206, Elsevier, Sep. 2013
	14	Tso-Fu Mark Chang, Wei-Hao Lin, Yung-Jung Hsu, Tatsuo Sato, Masato Sone, Cathodic Deposition of TiO2 Thin Films with Supercritical CO2 Emulsified Electrolyte ,Electrochemistry Communications., Vol.33, C, pp.68-71, Jun. 2013
	15	Rina Khanum, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone, "Control of Pore Structure in Porous Nickel Films Fabricated by Electroplating with Supercritical CO2 Emulsion", ECS Electrochemistry Letters., No.2, Vol.10, D43-D44, Jul.2013
	16	Wei-Hao Lin, Tso-Fu Mark Chang, Yi-Hsuan Lu, Tatsuo Sato, Masato Sone, Kung-Hwa Wei, Yung-Jung Hsu, "Supercritical CO2-Assisted Electrochemical Deposition of ZnO Mesocrystals for", The Journal of Physical Chemistry, C. No.117, vol.48, pp.25596-25603, Dec. 2013
国際会議	17	Masato Sone, Byung-Hoon Woo, Tso-Fu Mark Chang, "Penetration of Ni-P Metal into Polymer by Electroless Deposition Utilizing Supercritical Carbon Dioxide" (Invited Lecture), Biosensors & Bioelectronics-Jun. 2013
	18	Wei-Hao Lin, Masato Sone, Tso-Fu Mark Chang, Tatsuo Sato, Yung-Jung Hsu, "Preparation of Uniform TiO2 Thin Films by Supercritical Carbon Dioxide", 223rd ECS Meeting, May.　2013.
	19	Takashi Nagoshi, Masahide Mutoh, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone, Sample size effect of electrodeposited nanocrystalline nickel, Program & Abstracts of Intenational Symposium on Strength of Fine Grained Materials - 60 years of Hall-Petch-., 14, Jun-13
	20	Masato Sone, Byung-hoon Woo, Tso-Fu Mark Chang, Hiroki Uchiyama, "Application of supercritical carbon dioxide into 3d integration of metal oxide/metal on polymer for biosensor and bioelectronics (Invited Lecture)", Integrative Biology-2013., Aug.2013
	21	Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone, "Effect of Pressure on Mechanical Properties of Nickel Film Electrodeposited Using Supercritical CO2 Emulsion Evaluated by Micro-Compression Test", MNE2013., Sep.2013
	22	Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone, "Fabrication of TiO2 Micro-structure by Cathodic Deposition", MNE2013., Sep.2013
	23	Hikaru Kinashi, Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone, "Mechanical Strength of Cu Electroplated in Supercritical CO2 Emulsion Using Micro-Compression Test", MNE2013., Sep.2013
	24	Yuma Ishimoto, Tetsuya Shimizu, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone, "Cu Wiring by Electrodeposition in supercritical CO2 Emulsified Electrolyte using Continuous flow reaction system", TACT2013., Oct.2013
	25	Wei-Hao Lin, Mana Tanabe, Tso-Fu Mark Chang, Yung-Jung Hsu, Tatsuo Sato, Masato Sone, "Preparation of ZnO Thin Films by Sc-CO2 Emulsion-Assisted Electrochemical Deposition", TACT2013., Oct.2013
	26	Hikaru Kinashi, Tetsuya Shimizu, Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone Glow discharge optical emission spectroscopic study of Cu film fabricated by electrodepostion using supercritical CO2 emulsified electrolyte", TACT2013., Oct-13
	27	Tso-Fu Mark Chang, Wei-Hao Lin, Yung-Jung Hsu, Tatsuo Sato, Masato Sone Effects of Fluorinated Surfactant in Cathodic Deposition of TiO2 Thin Films with Supercritical CO2 Emulsified Electrolyte", TACT2013., Oct-13
	28	Rina Khanum, Tso-Fu Mark Chang, Takabumi Nagai, Tatsuo Sato, Masato Sone Porous Nickel Films Plated in Supercritical Carbon Dioxide Emulsified Electrolyte Using a Series of Fluorinated Nonionic Surfactants", TACT2013., Oct-13
	29	Masato Sone, Tetsuya Shimizu, Tso-Fu Mark Chang, Yuma Ishimoto, Hikaru Kinashi, Takashi Nagoshi, Tatsuo Sato, "Nanoscale Wiring By Cu Electrodeposition in Supercritical Carbon Dioxide (Invited Lecture)", ECS., Nov-13
国内会議	30	曽根正人(招待講演), 超臨界二酸化炭素エマルションを用いたCu電気めっき法による微細埋込配線技術, 第日本機械学会関東支部総会講演会「機械工学が支援する微細加工技術（半導体・MEMS・NEMS）」, Mar-2013.
	31	曽根正人, 超臨界ナノプレーティングを用いたセラミックス／金属薄膜積層技術（招待講演）, 新学術領域研究「プラズマとナノ界面の相互作用に関する学術基盤の創成」., Sep-13
	32	青木拓朗, Tso-Fu Mark Chang, 曽根正人, 小林郁夫, 里達雄, 高濃度鉄を含むAl-Zn-Mg合金の加工-半溶融成型組織および機械的性質, 軽金属学会., Nov-13
	33	永井宏明, Tso-Fu Mark Chang, 曽根正人, 小林郁夫, 里達雄, 半溶融鋳造したAl-７％Si-0.6％Mg合金段付き鋳物材のミクロ組織と機械的性質, 軽金属学会., Nov-13
	34	名越貴志, 木梨光, 武藤雅英, Tso-Fu Mark Chang, 里達雄, 曽根正人, マイクロ圧縮試験を用いた銅めっき膜の力学的特性評価, 日本銅学会第５３回講演大会., Nov-13
	35	曽根正人, 平滑なNi-P無電解めっき皮膜を実現する前処理手法, ＣＩＣ東京新技術説明会, Nov-13
書籍	36	Masato Sone, Hiroki Uchiyama, Tso-Fu Mark Chang, "Advanced Topics on Crystal Growth" Chapter 11: Crystal Growth by Electrodeposition with Supercritical Carbon Dioxide Emulsion, No.11, pp335-376, Feb-13

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